Descrição
Table of Contents
Introduction to metrology for micro- and nanotechnology
Some basics of measurement
Precision measurement instrumentation – some design principles
Length traceability using interferometry
Displacement measurement
Surface topography measurement instrumentation
Scanning probe and particle beam microscopy
Surface topography characterisation
Co-ordinate metrology
Mass and force measurement
References
Appendix A: SI units of measurement and their realisation at NPL
Appendix B: SI derived units
